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Microfabrication Method for Electromechanical Devices

Technology #99096

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Researchers
Peter J Schiller
Managed By
Larry Micek
Technology Licensing Officer 612-624-9568
Patent Protection
US Patent 6,816,301
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Electromechanical Microfabrication Term Sheet [PDF]

Microelectromechanical Device Fabrication

A method for the fabrication of microelectromechanical devices to produce high-performance, high-yield and high-tolerance devices has been developed. The method combines the advantages of conventional surface and bulk micromachining processes using a sacrificial layer to create an integrated microelectromechanical system.

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** Contact Larry Micek for specific details. **

Microfabrication Applications

The invention maintains the mechanical integrity of the substrate on which the devices are formed until the last processing steps, increasing the yield of the process. It relates to a method of microfabrication that can be applied to a wide variety of fabricated and/or actuator devices. Potential applications include pressure sensors, gas or liquid pumps, infrared detectors, accelerometers, flow sensors, vibration sensors and resonant devices.

BENEFITS OF HIGH-YEILD, HIGH-PERFORMANCE MICROELECTROMECHANICAL DEVICES:

  • Combines the advantages of conventional surface and bulk micromachining processes.
  • Produces high-performance, high-yield and high-tolerance devices.
  • Potential applications include pressure sensors, gas or liquid pumps, infrared detectors, accelerometers, flow sensors, vibration sensors and resonant devices.

Phase of Development Pilot scale demonstration